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EXHIBIT 10.18

EMPLOYMENT AGREEMENT

        This Employment Agreement, dated as of May 3, 2004, is entered into between Tegal Corporation (the “Company”) and Steven Selbrede (“Employee”).

         WHEREAS , the Company desires to employ and retain the services of Employee, and Employee wishes to become employed by the Company, on the terms set forth in this Agreement;

         NOW, THEREFORE , in consideration of the promises and the mutual covenants set forth in this Agreement, the Company and Employee agree as follows:

1.      Term of Employment . Subject to the termination provisions hereinafter set forth, the Company will employ the Employee, and the Employee accepts employment with the Company, for a period of two years (the “Term”) commencing as of the date first written above.

2.      Duties . The Employee will serve as Vice President and Chief Technology Officer reporting to the Chief Executive Officer of the Company, or to any other person as the Chief Executive Officer may thereafter designate. The Employee will also serve, on an interim basis as determined by the Chief Executive Officer, as General Manager of the “Etch Business Unit” of the Company, for which no additional compensation shall be provided. The Employee will discharge such duties and responsibilities as are customary for such position or are prescribed from time to time by the Company. The Employee will devote his full time and attention to the affairs of the Company and will not enter the employ of or serve as a consultant to, or in any way perform any services for, with or without compensation, any other person, business or organization without the prior approval of the Company. In no event may any such service be inconsistent with, or prevent Employee from carrying out, his duties under this Agreement, as determined at the sole discretion of the Company.

3.      Maintaining Confidential Information/Property Rights . Employee agrees to sign and abide by Company policies regarding Confidential & Proprietary Information and Intellectual Property/Property Rights, as attached hereto.

4.      Non-Competition; Non-Solicitation . During the Term and any Salary Continuation Period as provided in Paragraph 9(a), Employee shall not, directly or indirectly:

(c)     own, manage, operate, advise, consult, join, control or participate in the ownership, management, operation or control of, be employed by, perform services for, or be connected in any manner with, any enterprise which is engaged in providing: i) any plasma etch system capable of etching “new materials”; ii) any PVD (physical vapor deposition) system competitive with the Company’s products; iii) any ALD (atomic level deposition) system or NLD (nano layer deposition) or MOCVD (metal organic deposition systems), or their equivalents, to any semiconductor, thin film head, mems or other device manufacturers anywhere in the world; provided , however , that such restriction shall not apply to Employee’s ownership of any passive investment representing an interest of less than five percent (5%) of an outstanding class of publicly traded securities; or

(d)     recruit, encourage or solicit any person who was an employee or contractor of the Company or any entity affiliated with the Company (the “Affiliated Entity”) to leave the Company’s or Affiliated Entity’s employ or service for any reason, or interfere in any material manner with employment or service relationships at the time existing between the Company or Affiliated Entity and the subject employee or contractor (except as may be required in any bona fide termination decision during the Term regarding any Company or Affiliated Entity employee) in order to induce such employee or contractor of the Company to accept other employment or a consulting agreement with any other person or entity.

Employee acknowledges that the services that he shall provide to the Company under this Agreement are unique and that irreparable harm shall be suffered by the Company in the event of the breach by Employee of any of his obligations under this Section 4, and that the Company shall be entitled, in addition to its other rights and remedies, whether legal or equitable, to enforce such obligations by an injunction or decree of specific performance. If any restriction set forth in this non-competition section is found by a court to be unreasonable, then Employee agrees, and hereby submits, to the reduction and limitation of such prohibition to such area or period as shall be deemed reasonable by such court.

5.      Salary and Incentives .

    (a)        Salary . During the Term, the Company will pay the


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